Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz
نویسندگان
چکیده
In this article, near-zero drift and high electromechanical coupling acoustic resonators have been designed demonstrated. The resonator is based on Lamb waves in a bimorph composed of lithium niobate silicon dioxide. Our approach breaks through performance boundary conventional Lamb-wave by introducing the while operating at higher order resonant modes. This enables to achieve frequency scalability, low-temperature coefficient frequency, altogether. temperature were analytically optimized for A 3 mode adjusting thicknesses different materials bimorph. Resonators with dimensions stack thickness fabricated measured, resulting ranging from -17.6 -1.1 ppm/°C, 13.4% 18%, quality factors up 800 3.5 GHz. achieved specifications are adequate fifth-generation (5G) sub-6-GHz bands n77 n78.
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ژورنال
عنوان ژورنال: IEEE Transactions on Microwave Theory and Techniques
سال: 2021
ISSN: ['1557-9670', '0018-9480']
DOI: https://doi.org/10.1109/tmtt.2021.3079497